SCEJ 85th Annual Meeting (2020): List of the applications (topics)

`SCEJ 85th Annual Meeting (2020) / / IChES 2020`

List of received applications (By topics code)

11) Electronics

11-c. Micro-processing (etching, thin film, etc.)

Most recent update: 2020-09-26 15:59:01

The keywords that frequently used in this topics code.	Keywords	Number
	RF plasma CVD	1
	Ti-based film	1
	multicomponent	1

ACKN No.	Title/Author(s)	Keywords	Style
534	Synthesis and characterization of multicomponent metal compound films containing nitrogen, titanium and other metals prepared by RF plasma CVD (Osaka Pref. U.) *(Stu)Matsushima Hiroaki, Fuji Kazuki, (Reg)Saito Takeyasu, (Reg)Okamoto Naoki	RF plasma CVD Ti-based film multicomponent	P

List of received applications (By topics code)

List of received applications
SCEJ 85th Annual Meeting (2020)
IChES 2020

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Most recent update: 2020-09-26 15:59:01
For more information contact Organizing Committee, SCEJ 85th Annual Meeting (2020) / / IChES 2020
E-mail: inquiry-85a

www3.scej.org

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