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chemical vapor deposition3$B7o(B*
carbon nanotube3$B7o(B*
SiC3$B7o(B*
carbon nanotubes2$B7o(B
graphene2$B7o(B
CVD2$B7o(B
polymerization reaction1$B7o(B

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104$BBQG.4p:`>e$G$NB?7k>=(BSi$BKl$N9bB.@=Kl$H5!3#GmN%5;=Q$N3+H/(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{F#ED(B $B@?(B$B!&(B ($BAaBg9bEy8&(B) ($B@5(B)$B?yL\(B $B91;V(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		polycrystalline silicon films
separation layer
lift-off process
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125$BDcG;EY9b3h@-
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catalytic chemical vapor deposition
carbon source
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130$BIbM7?(G^$rMQ$$$?C1AX%+!<%\%s%J%N%A%e!<%V$N5$Aj9g@.$HH?1~>l!&N.$l>l$N2r@O(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{JBLZ(B $B9nLi(B$B!&(B ($BAaBg9bEy8&(B) ($B@5(B)$B?yL\(B $B91;V(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($B@5(B)$BLnED(B $BM%(B		single-wall carbon nanotube
reaction field control
computational fluid dynamics ( CFD )
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191SiC-CVI$B%W%m%;%9$K$*$1$k9bG;EY86NA6!5k>r7o2<$G$N@=Kl%b%G%k$N8!F$(B(2)
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SiC
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213$B2=3X5$Aj@.D9K!$K$h$k%0%i%U%'%s9g@.$N9bB.2=$HH?1~>l$N;0
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graphene
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313$B5$AjIbM7%3!<%F%#%s%0%W%m%;%9$K$h$k%]%j%^!
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polymerization reaction
dry coating process
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336$BIbM7C4;}?(G^$K$h$k%+!<%\%s%J%N%A%e!<%V$N9b@8;:@-O"B39g@.(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{qH(B $Bz*Zp(B$B!&(B ($B3X(B)$B2,ED(B $BfFJ?(B$B!&(B ($BAaBg9bEy8&(B) ($B@5(B)$B?yL\(B $B91;V(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BBgBt(B $BMxCK(B$B!&(B ($BJ]EZC+2=3X9)6H(B) ($BK!(B)$BDMED(B $B9b9T(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotube
floating supported catalyst
chemical vapor deposition
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382Al$B4pHD>e$G$N%+!<%\%s%J%N%A%e!<%V9g@.!"=89g7ABV@)8f$HEAG.1~MQ(B
($BAaBg@h?JM}9)(B) ($B3X(B)$B!{0B@Q(B $Bg}M3(B$B!&(B ($BAaBg9bEy8&(B) ($B@5(B)$B?yL\(B $B91;V(B$B!&(B ($B%G%s%=!<(B) ($BK!(B)$BB@ED(B $B%"%&%s(B$B!&(B ($BK!(B)$BBgEg(B $B5W=c(B$B!&(B ($BAaBg@h?JM}9)(B) ($B@5(B)$BLnED(B $BM%(B		carbon nanotubes
aluminum substrate
chemical vapor deposition
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432$B%G%#!<%<%k%(%s%8%s$rMQ$$$?%+!<%\%s%J%N%A%e!<%V$N9g@.5!9=$*$h$S@8@.5!9=$K4X$9$k8&5f(B
($BEl9)Bg1!M}9)(B) ($B3X(B)$B!{NkLZ(B $B=S2p(B$B!&(B ($BEl9)BgJ*		carbon nanotube
diesel engine
growth mechanism
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502CVI$B$K$*$1$kA!0]$X$N(BSiC$B4^?;2aDx%7%_%e%l!<%7%g%s(B
($BElBg1!9)(B) ($B3X(B)$B!{gULg(B $BM$0l(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BCf(B $BCRL@(B$B!&(B (IHI$B4pHW8&(B) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$B=P1:(B $BEm;R(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		SiC
CVI
Multiscale
O
542SiC-CVI$B%W%m%;%9$K$*$1$kC:2=?eAG%,%9E:2C8z2L(B
($BElBg1!9)(B) ($B3X(B)$B!{:,El(B $B2B;K(B$B!&(B ($B3X(B)$B:4F#(B $BEP(B$B!&(B ($B3X(B)$BCf(B $BCRL@(B$B!&(B ($B3X(B)$BgULg(B $BM$0l(B$B!&(B (IHI) ($B@5(B)$BJ!Eg(B $B9/G7(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$B=P1:(B $BEm;R(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B@5(B)$BAz3@(B $B9,9@(B		CVI
SiC
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575$B8GBNC:AG8;$rMQ$$$?%W%i%:%^(BCVD$B$K$h$k%0%i%U%'%sKl$N9g@.(B
($B@EBg1!9)(B) ($B3X(B)$B!{D%(B $Bb}(B$B!&(B ($B@EBg(B) $B>.NS(B $B7r5HO:(B$B!&(B ($B@EBg1!9)(B) ($B@5(B)$B9&(B $B>;0l(B		graphene
plasma
CVD
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639$BG.(BCVD$BK!$K$h$k9b(BAl$BAH@.(Bfcc-TiAlN$BKl$N9g@.(B
($BElBg1!9)(B) ($B3X(B)$B!{:4F#(B $B9($B!&(B ($BElBg9)(B) $B;38}(B $B=a(B$B!&(B ($BElBg1!9)(B) $BJ?86(B $BCR;R(B$B!&(B ($B5~%;%i(B) ($BK!(B)$B5WJ](B $BH;?M(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$B=P1:(B $BEm;R(B$B!&(B ($B@5(B)$BI4@%(B $B7r(B$B!&(B ($B5~%;%i(B) ($BK!(B)$BC+^<(B $B1I?N(B$B!&(B ($BElBg1!9)(B) ($B@5(B)$BAz3@(B $B9,9@(B		CVD
TiAlN
cutting tool
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641$BB?9&@-%7%j%+$GHoJ$$5$l$?(BNi $BN3;R$"$k$$$O(BNi $BHD$+$i$N(BCNT$B@8@.(B
($B6eBg1!9)(B) ($B3X(B)$B!{;3K\(B $BH;Li(B$B!&(B ($B@5(B)$B>>:,(B $B1Q$B!&(B ($B@5(B)$B;3K\(B $B9d(B$B!&(B ($B@5(B)$B4_ED(B $B>;9@(B		carbon nanotube
Ni catalyst
silica coating
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(C) 2018 $B8x1W
Most recent update: 2018-09-07 21:29:01
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