SCEJ

$B2=3X9)3X2q(B $BBh(B74$BG/2q(B($B2#IM(B)

$B9V1i%W%m%0%i%`!J%;%C%7%g%sJL!K(B

$B%(%l%/%H%m%K%/%9(B

A120-A122

$B:G=*99?7F|;~!'(B2009-03-11 14:01:08
$B9V1i(B
$B;~9o(B		$B9V1i(B
$BHV9f(B		$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$BJ,N`(B
$BHV9f(B		$B$BHV9f(B
A$B2q>l(B $BBh(B1$BF|(B
(15:20$B!A(B16:20)$B!!(B($B:BD9(B $B6b!!_f_=(B)
15:20$B!A(B 15:40A120$B%@%$%d%b%s%I%i%$%/%+!<%\%sKl$K$h$k6/M6EEBN$NNt2=M^@)8z2L(B
($B:eI\Bg9)(B) $B!{(B($B3X(B)$BOB@t(B $BMW(B$B!&(B($B3X(B)$BW"ED(B $BM40lO:(B$B!&(B($B@5(B)$B2,K\(B $B>0$B!&(B($B@5(B)$BsnF#(B $B>f{J(B$B!&(B($B@5(B)$B6aF#(B $BOBIW(B$B!&(B$B5HB<(B $BIp(B$B!&(B$BF#B<(B $B5*J8(B		ferroelectric
diamond like carbon
CVD
11-a741
15:40$B!A(B 16:00A121$B;0%U%C2=1vAG%,%9$K$h$k(BSiO2$B%(%C%A%s%0B.EY2r@O(B
($B2#9qBg1!9)(B) $B;01:(B $BK-(B$B!&(B$B3^86(B $BM5(B$B!&(B$B!{(B($B@5(B)$B1)?<(B $BEy(B$B!&(B($B4XElEE2=(B) $BIpCN(B $BD>?M(B$B!&(B$B?<9>(B $B8yLi(B		Etching
SiO2
ClF3
11-a231
16:00$B!A(B 16:20A122$BF<%$%*%s$N%^%$%0%l!<%7%g%s(B
($B5~Bg(B) $B!{(B($B@5(B)$B2.Ln(B $BJ84](B		electrochemical migration
electrochemical reaction
copper ion
11-b7
$B9V1i%W%m%0%i%`(B
$B2=3X9)3X2q(B $BBh(B74$BG/2q(B($B2#IM(B)
(C) 2009 ($B
Most recent update: 2009-03-11 14:01:08
For more information contact $B2=3X9)3X2q4XEl;YIt(B $BBh(B74$BG/2q(B $BLd$$9g$;78(B
E-mail: inquiry-74awww2.scej.org
This page was generated by easp 2.26; proghtml 2.26b (C)1999-2008 kawase