$B:G=*99?7F|;~!'(B2009-03-05 21:04:01
$B$3$NJ,N`$G$h$/;H$o$l(B $B$F$$$k%-!<%o!<%I(B | $B%-!<%o!<%I(B | $B | |
---|---|---|---|
ferroelectric | 1$B7o(B | ||
ClF3 | 1$B7o(B | ||
SiO2 | 1$B7o(B | ||
CVD | 1$B7o(B | ||
Etching | 1$B7o(B | ||
diamond like carbon | 1$B7o(B |
$B | $B9V1iBjL\!?H/I=$B%-!<%o!<%I(B | $B | |
---|---|---|---|
231 | $B;0%U%C2=1vAG%,%9$K$h$k(BSiO2$B%(%C%A%s%0B.EY2r@O(B | Etching SiO2 ClF3 | 11/24 21:21:14 |
741 | $B%@%$%d%b%s%I%i%$%/%+!<%\%sKl$K$h$k6/M6EEBN$NNt2=M^@)8z2L(B | ferroelectric diamond like carbon CVD | 11/26 19:17:22 |