SCEJ

$B2=3X9)3X2q(B $BBh(B40$B2s=)5(Bg2q(B

$B9V1i?=$79~$_0lMw!J%7%s%]%8%&%`!&9V1iJ,N`JL!K(B


S) $B%7%s%]%8%&%`(B

S-38. $B#C#V#D!&%I%i%$%W%m%;%9%7%s%]%8%&%`!!!]%J%N!&%^%$%/%m9=B$7A@.%W%m%;%9$NH?1~9)3X!](B

$B%*!<%,%J%$%6!<(B $B!{1)?fLw!J:eI\Bg!K!$?y;3@5OB!JEl5~Bg!K(B

$B7P83$H4*$G:GE,2=$5$l$,$A$J%J%N!&%^%$%/%m9=B$7A@.%W%m%;%9$G$9$,!"!V$J$xCe!"EII[!">=@O!"%I%i%$!&%&%(%C%H%(%C%A%s%0!"$a$C$-$J$I$K$D$$$F!"!V$J$]$d2=3XH?1~O@$K4p$E$$$F5DO@$7$^$9!#6=L#?<$$L$2rL@8=>]$NOCBjDs6!$bBg4?7^$G$9!#H?1~9)3X$K1o$NGv$+$C$?J}!9$b!"$<$R$4;22C$/$@$5$$!#(B

$B:G=*99?7F|;~!'(B2008-09-20 14:29:01

$B$3$NJ,N`$G$h$/;H$o$l(B
$B$F$$$k%-!<%o!<%I(B
$B%-!<%o!<%I(B$B
MOVPE7$B7o(B**
Single-walled carbon nanotubes4$B7o(B*
Liquid pulse injection technique2$B7o(B
InN2$B7o(B
chemical vapor deposition2$B7o(B
Carbon nanotube2$B7o(B
selective area growth2$B7o(B
sputter deposition2$B7o(B
Silicon2$B7o(B
carbon nanofibers2$B7o(B
CVD2$B7o(B
surface modification1$B7o(B

$B$BHV9f(B$B9V1iBjL\!?H/I=$B%-!<%o!<%I(B$B
14$B;0%U%C2=1vAG%,%9$K$h$k(B4H-SiC$B%(%C%A%s%0B.EY2r@O(B
($B2#9qBg1!9)(B) $B;01:(B $BK-(B$B!&(B$B>!8+(B $BM:2p(B$B!&(B$BEDCf(B $B7C;R(B$B!&(B$B!{(B($B@5(B)$B1)?<(B $BEy(B$B!&(B($B4XElEE2=(B) $B9b(B $B86(B$B!&(B$B?<9>(B $B8yLi(B$B!&(B($B;:Am8&(B) $B2CF#(B $BCR5W(B$B!&(B$B1|B<(B $B85(B$B!&(B$B9S0f(B $BOBM:(B
SiC
ClF3
Etching
4/15
09:38:59
63$BEE;R%G%P%$%9MQ%3%P%k%H%7%j%5%$%IGvKl$N7k>=@.D9$NM}2r$H@)8f(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BDT(B $BM3$B!&(B($B@5(B)$BDT(B $B2B;R(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
cobalt disilicide
crystal growth
sputter deposition
4/23
16:29:58
64$B%9%Q%C%?K!$K$h$k(BFePt$B<'@-BN%J%N%m%C%I$N9=B$!&<'5$FC@-@)8f(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BDT(B $B2B;R(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
magnetic nanorod
local epitaxy
sputter deposition
4/23
16:43:47
94$B%Q%k%9Ne5/BO@QK!$K$h$kCb2=J*GvKl@.D9$N%a%+%K%:%`(B
($BElBg@88&(B) $B!{(B($BIt(B)$B0f>e(B $BLP(B$B!&(B($B@5(B)$B2,K\(B $B9@0lO:(B$B!&(B($B@5(B)$BB@ED(B $B$B!&(B($BIt(B)$BF#2,(B $BMN(B$B!&(B($BD;
Pulsed Excitation Deposition
epitaxial growth
nitride
4/24
15:20:27
99$B%^%$%/%m%W%i%:%^$K$h$k@D?'H/8w%7%j%3%s%J%NN3;R$N9g@.$HI=LL=$>~(B
($BEl9)Bg(B) $B!{(B($B@5(B)$BLn:j(B $BCRMN(B$B!&(B$BCfL6ED(B $B?r;K(B$B!&(B$B:4@n(B $B@55-(B$B!&(B($B@5(B)$B2,:j(B $B7r(B
Silicon nanocrystal
microplasma
quantum confinement
4/24
16:51:46
112$B<+8JAH?%2=$rMxMQ$7$?C1AX(BCNT$B%U%#!<%k%I%(%_%C%?$N9bL)EY=8@Q(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BLnED(B $BM%(B$B!&(B($BBgF|K\%9%/%j!<%s(B) $B8E;T(B $B9M$B!&(B($BElBg1!9)(B) ($B@5(B)$BGrD;(B $BMN2p(B$B!&(B($B@5(B)$BDT(B $B2B;R(B$B!&(B($B3X(B)$B?yL\(B $B91;V(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
field emitter array
single-walled carbon nanotubes
self-organization
4/24
19:51:15
119$BEE;R%(%_%C%?1~MQ$rL\E*$H$7$?C1AX%+!<%\%s%J%N%A%e!<%V$N7ABV@)8f$H%3%s%S%J%H%j%"%kFC@-I>2A(B
($BElBg1!9)(B) $B!{(B($B@5(B)$BGrD;(B $BMN2p(B$B!&(B($BBgF|K\%9%/%j!<%s@=B$(B) $B8E;T(B $B9M$B!&(B($BElBg1!9)(B) ($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$BDT(B $B2B;R(B$B!&(B($B3X(B)$B?yL\(B $B91;V(B$B!&(B$BD%(B $B@559(B$B!&(B$B4];3(B $BLPIW(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
Single-walled carbon nanotubes
Field emission
Combinatorial evaluation
4/25
09:34:34
139$B%>%k!>%2%kK!$K$h$k(BCaBi4Ti4O15$B6/M6EEBN$N@=Kl(B
($B:eI\Bg2=9)(B) $B!{(B($B3X(B)$BW"ED(B $BM40lO:(B$B!&(B$BBgLx(B $BKcN$;R(B$B!&(B($B@5(B)$B2,K\(B $B>0$B!&(B($B@5(B)$BsnF#(B $B>f{J(B$B!&(B($B@5(B)$B6aF#(B $BOBIW(B
ferroelectric random access memory
sol-gel
curie temperature
4/25
11:12:01
162InGaAsP$B7O(BMOVPE$B$K$*$1$kI=LL5[CeAXB.EY2aDx$N(Bin situ$B4Q;!$H%b%G%k2=(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B$B!&(B($BElBg1!9)(B) ($B@5(B)$B?y;3(B $B@5OB(B
MOVPE
InGaAsP
surface adsorption layer
4/25
14:15:47
183$BM-5!(BN$B86NA$K$h$k(BInN$BGvKl$N(BMOVPE$B@.D9(B
($BElBg?7NN0h(B) $B!{(B($BIt(B)Thieu Q. T.$B!&(B($BIt(B)$B4X(B $BM55*(B$B!&(B($BIt(B)$B7&C+(B $BLP9,(B$B!&(B($BIt(B)$BJR;3(B $BN5Fs(B$B!&(B($BIt(B)$BHxFi(B $B8&B@O:(B
MOVPE
InN
epitaxy
4/25
16:04:59
194$B7A>u%7%_%e%l!<%7%g%s$K$h$k(BSi$B?<7!$j(BRIE$B$N%b%G%j%s%0(B
($BEl0;V(B$B!&(B($B@5(B)$B6LCV(B $BD>
topography simulation
silicon
RIE
4/25
17:27:54
277$B?(G^(BCVD$BK!$K$*$1$kC1AX%+!<%\%s%J%N%A%e!<%V?bD>G[8~@.D9$NA06nBN(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B?yL\(B $B91;V(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
single-walled carbon nanotubes
chemical vapor deposition
gas phase reaction
4/28
13:26:23
279$B0!1t4T85K!$rMQ$$$?%7%j%3%s@8@.$K$*$1$kH?1~2r@O(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B>e_7(B $BL@1{(B$B!&(B($B@5(B)$B0p_7(B $B?8(B$B!&(B$B;09%(B $BL@(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
silicon powder
zinc reduction
reaction analysis
4/28
13:30:31
294Plasma-Assisted Formation of Silicon Nanoparticles Using SiBr4
(Graduate School of Eng. the U. Tokyo) $B!{(B($B3X(B)Shen Peng$B!&(B($B3X(B)Uesawa Norihisa$B!&(B($B@5(B)Inasawa Susumu$B!&(B($B@5(B)Yamaguchi Yukio
Plasma-CVD
Silicon Nanoparticle
Silicon Tetrabromide
4/28
14:25:55
311$B7V8w%W%m!<%V$rMQ$$$?%^%$%/%mGH$K$h$kH?1~B%?J5!9=$N2rL@(B
($B6bBtBg(B) $B!{(B($B3X(B)$B1JC+(B $B=(B@O:(B$B!&(B$BF#4](B $BFX;K(B$B!&(B$B>.@>(B $B0&(B$B!&(B($B@5(B)$BHf9>Eh(B $BM42p(B$B!&(B($B@5(B)$B9b66(B $B7{;J(B
microwave
fluorescence
4/28
15:39:01
330$B%1%$AG=$>~%+!<%\%s%J%N%U%!%$%P!<$N@=B$(B
($B5~Bg1!9)(B) $B!{(B($B3X(B)$B5W>>(B $B<#(B$B!&(B($B3X(B)$B1|B<(B $BBsLi(B$B!&(B($B@5(B)$BEDLg(B $BH%(B$B!&(B($BKLBg1!9)(B) ($B@5(B)$B8~0f(B $B?B(B
carbon nanofibers
Liquid pulse injection technique
Si coating
4/28
16:39:46
384$B8:05(BCVD$BK!$K$h$k(BSiGe$B%(%T%?%-%7%c%k@.D9$N2r@O%b%G%k(B
($BM}8&(B) $B!{(B($BIt(B)$B:#0f(B $B@5?M(B$B!&(B$B5\B<(B $B2B;y(B$B!&(B$B?@ED(B $B5.M5(B$B!&(B$BB
SiGe
RP-CVD
CHEMKIN
4/28
19:40:20
387$B%+!<%\%s%J%N%A%e!<%V9g@.$N$?$a$N5!G=J,C4?(G^$N3+H/(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BLnB<(B $B7KJc(B$B!&(B($B3X(B)$BD9C+@n(B $B3>(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
carbon nanotube
catalyst
chemical vapor deposition
4/28
19:54:21
413[$BE8K>9V1i(B]$BM-5!6bB05$AjA*Br@.D9K!$K$h$kH>F3BN%J%N%o%$%d$N@.D9$H$=$N@.D95!9=(B
($BKLBgNL;R=8@Q%;%s%?!<(B) $B!{(B($BIt(B)$BHfN14V(B $B7rG7(B$B!&(B($BIt(B)$B86(B $B??FsO:(B$B!&(B($BIt(B)$BK\5W(B $B=g0l(B$B!&(B($BIt(B)$BJ!0f(B $B9';V(B
MOVPE
nanowaire
selective growth
4/29
00:02:38
430$BG.(BCVD$BK!$rMQ$$$?%A%?%s;@%P%j%&%`6/M6EEBNGvKl$N:n@=$H$=$NJ*@-$K4X$9$k8!F$(B
($BEl3$Bg1!9)(B) $B!{(B($B3X(B)$B4X:,(B $BE0L@(B$B!&(B($B3X(B)$B@nEg(B $BCN;j(B$B!&(B$B:4F#(B $B98(B$B!&(B$B1|B<(B $BM%L4(B$B!&(B$B@u@n(B $BBs(B$B!&(B($B@5(B)$B=);3(B $BBY?-(B
Barium Titanate
Ferroelectric substance
CVD
4/29
14:08:50
460$B%+!<%\%s%J%N%A%e!<%V!&%S%"G[@~$K8~$1$?GvKl?(G^$N3+H/(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BGr0f(B $B@;(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
Carbon nanotube
4/29
19:31:46
470In-situ$B@V30J,8wJ,@O$rMQ$$$?G.J,2rC:AG(BCVD$BH?1~2aDx$N?dDj(B
($B5~Bg9)(B) ($B@5(B)$B2O@%(B $B85L@(B$B!&(B$B!{(B($B3X(B)$B0KF#(B $B7IJ8(B$B!&(B($B@5(B)$B;01:(B $B9'0l(B
pyrocarbon
CVD
infrared absorption
4/29
23:15:46
542$B0[J}@-!&EyJ}@-$rAH$_9g$o$;$?%7%j%3%s?<7!$j%(%C%A%s%0$N7A>u$X$N%"%9%Z%/%HHf$N8z2L(B
($BElBg1!9)(B) $B!{(B($BIt(B)$B5WJ]ED(B $B2mB'(B$B!&(B$B;0ED(B $B5HO:(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B
Deep RIE
Silicon
Topography
4/30
11:44:33
575$B%Q%i%8%&%`GvKl$r46CN:`$H$9$k?eAG%;%s%5!<(B
($B1'ET5\Bg1!9)(B) $B!{(B($B3X(B)$B9bLx(B $BCR(B$B!&(B($B@5(B)$B:4F#(B $B9d;K(B$B!&(B($B@5(B)$B0KF#(B $BD>
hydrogen
sensor
palladium
4/30
13:06:15
576$BI=LL=$>~%+!<%\%s%J%N%U%!%$%P!<$N@=B$(B
($B5~Bg1!9)(B) $B!{(B($B3X(B)$BCSED(B $BF;<#(B$B!&(B($B3X(B)$B5W>>(B $B<#(B$B!&(B($B3X(B)$B;38}(B $B>PH~(B$B!&(B($B@5(B)$BEDLg(B $BH%(B$B!&(B($BKLBg1!9)(B) ($B@5(B)$B8~0f(B $B?B(B
carbon nanofibers
Liquid pulse injection technique
surface modification
4/30
13:07:03
596$B4pHD>e$NC1AX%+!<%\%s%J%N%A%e!<%V$N9bB.@.D92aDx$K$*$1$kD>7BJQ2=(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BD9C+@n(B $B3>(B$B!&(B($B@5(B)$BLnED(B $BM%(B$B!&(B($B@5(B)$B;38}(B $BM34tIW(B
Single-walled carbon nanotubes
catalytic chemical vapor deposition
growth mechanism
4/30
13:37:02
681$B%^%$%/%mG.%W%i%:%^$rMQ$$$?(BSiO2$B5Z$S(BTiO2$B9=B$BN$N7A@.(B
($B;37ABg1!M}9)(B) $B!{(B($B3X(B)$B:XF#(B $BM4Je(B$B!&(B($B@5(B)$BPrED(B $BCi90(B
plasma
4/30
15:55:37
825PLD$BK!$K$h$k(BBi-Te$B7OG.EEAG;RGvKl$N:n@=$HI>2A(B -3-
($B:eI\Bg9)(B) $B!{(B($B3X(B)$BB<>e(B $BH~:;(B$B!&(B(MEITEC CORPORATION) ($B@5(B)$B:4F#(B $BL@I'(B$B!&(B($BEl3$M}2=(B) ($B@5(B)$BKY;3(B $BCRG7(B$B!&(B($B:eI\Bg9)(B) ($B@5(B)$BDE5W0f(B $BLP
PLD
Bi-Te
Thermoelectric
4/30
18:37:25
837MOVPE$B$K$*$1$k;@2=%"%k%_%K%&%`$K$h$k(BGaAs(001)$BLL$N(Bin situ $B%Q%C%7%Y!<%7%g%s(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B;{ED(B $BM:5*(B$B!&(B($B3X(B)$B=P1:(B $BEm;R(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B$BCfLn(B $B5A><(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B
in situ passivation
GaAs
MOVPE
4/30
18:54:23
847$B%^%/%m%-%c%S%F%#K!$rMQ$$$?(BCu-SCFD$B$N2r@O$HNL;:BP1~AuCV$N35G0@_7W(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BI4@%(B $B7r(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B
supercritical
copper
deposition
4/30
19:11:28
851$BGr6b%J%NN3;R$NC4;}$H8w?(G^3h@-(B
($B:eI\Bg1!9)(B) $B!{(B($B3X(B)$B9g@n(B $B1QCK(B$B!&(B($B@5(B)$BDE5W0f(B $BLP$B!&(B($B5~Bg1!9)(B) ($B@5(B)$BD9Nf(B $B?.Je(B$B!&(B($B3X(B)$BEDCf(B $BNI7I(B
pulsed laser deposition
Pt nanoparticle
photocatalyst
4/30
19:17:22
860InGaAsP$B7O(BMOVPE$B$K$*$1$kH?1~O'7A>u0MB8@-(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B54DM(B $BN4M4(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
MOVPE
Simulation
4/30
19:21:47
888$BA*Br@.D9(BInGaN$BNL;R0f8M$K$*$1$k5$Aj3H;6$N8z2L(B
($BElBg1!9)(B) $B!{(B($B3X(B)$BIYED(B $BM45.(B$B!&(B($B3X(B)$B1vED(B $BNQLi(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
InGaN
Selective Area Growth
MOVPE
4/30
19:51:01
908$BD6NW3&Fs;@2=C:AG$rMQ$$$?;@2=%A%?%s$N:n@=>r7o(B
($BEl3$Bg1!9)(B) $B!{(B($B3X(B)$B1|B<(B $BM%L4(B$B!&(B($BEl3$Bg9)(B) $B9b66(B $B7rB@(B$B!&(B($BEl3$Bg1!9)(B) ($B@5(B)$B=);3(B $BBY?-(B
supercritical fluid deposition
Titanium oxide
4/30
20:13:42
909ULSI$B6KGv(BCu$BKl$N(BSCFD$B@=Kl>r7o2<$G$N6E=85sF0$H@)8f(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B@1Ln(B $BOBLi(B$B!&(B($B3X(B)$BI4@%(B $B7r(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B
supercritical carbon dioxide
ultra-thin Cu film
4/30
20:13:48
977MOVPE$BA*Br@.D9$K$*$1$k(BInN$B@.D9B.EYJ,I[$N2r@O(B
($BElBg1!9)(B) $B!{(B($B3X(B)$B1vED(B $BNQLi(B$B!&(B($B@5(B)$B?y;3(B $B@5OB(B$B!&(B($B@5(B)$BAz3@(B $B9,9@(B$B!&(B($BElBg@hC<8&(B) $BCfLn(B $B5A><(B
MOVPE
selective area growth
InN
4/30
21:43:01
1021$BD6NW3&N.BNCf$G$N(BZnO$BGvKl$NBO@Q(B
($B;3M|Bg1!(B) $B!{(B($B@5(B)$B6aF#(B $B1Q0l(B$B!&(B($B;3M|Bg9)(B) $B:4!9LZ(B $B7rFs(B$B!&(B($B;3M|Bg1!(B) $BFiC+(B $BD*0l(B
$BD6NW3&N.BN(B
ZnO
5/2
10:36:59

$B9V1i?=$79~$_0lMw(B($B%7%s%]%8%&%`HV9f!&9V1iJ,N`HV9fJL(B)

$B
$B2=3X9)3X2q(B $BBh(B40$B2s=)5(Bg2q(B

(C) 2008 ($B
Most recent update: 2008-09-20 14:29:01
For more information contact $B2=3X9)3X2qElKL;YIt(B $BBh(B40$B2s=)5(Bg2q(B $BLd$$9g$;78(B
E-mail: inquiry-40fwww2.scej.org
This page was generated by easp 2.24; update.pl 2.23 (C)1999-2007 kawase